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Compact mm-wave power combiners in 65nm CMOS-SOI

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3 Author(s)
Yi Zhao ; ERL/DIMES, Delft Univ. of Technol., Delft, Netherlands ; Long, J.R. ; Spirito, M.

Compact, slow-wave coplanar waveguide (S-CPW) power combiners are characterized in the 60GHz band. A floating electric shield promotes slow-wave propagation, while implementation in 65nm CMOS-SOI technology allows utilization of the entire interconnect metal stack to lower losses. Measured slowing factors as high as 11 lead to a reduction in size by a factor up to 4.4 for a 60GHz combiner. Measured attenuation and insertion loss of the S-CPW combiners are <;0.3dB per λ/4 and <;0.6dB/150μm length at 60GHz, respectively, with quality factors ranging from 25 to 45. The effects of ground-signal gap and shield density on characteristic impedance, attenuation, Q-factor and effective permittivity are described.

Published in:

Silicon Monolithic Integrated Circuits in RF Systems (SiRF), 2011 IEEE 11th Topical Meeting on

Date of Conference:

17-19 Jan. 2011