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Development of a MEMS-based Raman spectrometer

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5 Author(s)
Russin, T. ; Adv. Circuits & Sensors Branch, Space & Naval Warfare Syst. Center Pacific (SSC Pacific), San Diego, CA, USA ; Fralick, M. ; Kerber, M. ; Wang, A.
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This paper discusses the development of a Raman spectrometer incorporated into a MEMS device for use in environmental monitoring against chemical and biological agents. The current design incorporates a 1525 nm laser diode as an optical pump source, and a tunable Fabry-Perot interferometer as the wavelength selection element.

Published in:

Sensors, 2010 IEEE

Date of Conference:

1-4 Nov. 2010