Miniature interferometer with corner cube mirrors

A miniature Wishbone type interferometer for a spectrometer is designed and fabricated, which has electrically actuated rotary comb drives. The three-dimensional corner cube mirror is mounted at the end of Si arms integrated with rotary comb drive actuators. The total size of the interferometer is approximately 8 mm × 8 mm, which is bonded with a glass substrate. The corner cube mirrors with sharp edges are fabricated using indentation technique. The size of the corner cube mirrors is approximately 1 mm × 1 mm × 0.5 mm. The rotation angle of the rotary comb drive was approximately 11 degrees at an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 μm was achieved, which corresponds to the theoretical resolution of ~4.0 cm
^-1
as a spectrometer.