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A new fabrication technique for integrating silica optical devices and MEMS

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4 Author(s)
Karen E. Grutter ; Berkeley Sensor and Actuator Center (BSAC), University of California, Berkeley, U.S.A. ; Anthony M. Yeh ; Susant K. Patra ; Ming C. Wu

We have developed a novel fabrication process which integrates silicon MEMS actuators with silica optical components. Suspended silica optical waveguides are actuated by a silicon electrostatic comb drive actuator, with a maximum displacement of 8 μm at 35 V bias.

Published in:

2010 International Conference on Optical MEMS and Nanophotonics

Date of Conference:

9-12 Aug. 2010