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Actuated Micro-optical Submount Using a Dielectric Elastomer Actuator

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6 Author(s)
Jordan, G. ; Fraunhofer Inst. for Reliability & Microintegration, Berlin, Germany ; McCarthy, D.N. ; Schlepple, N.N. ; Krissler, J.
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Analysis of the operating characteristics of a dielectric elastomer actuator (DEA) submount for the high-precision positioning of optical components in one dimension is presented. Precise alignment of a single-mode fiber is demonstrated and variation of the sensitivity of the submount motion by changing the bias voltage is confirmed. A comparison of the performance of the DEA submount with a piezoelectric alignment stage is made, which demonstrates that DEAs could present a very attractive, low-cost alternative to currently used manual technologies in overcoming the hurdle of expensive packaging of single-mode optical components.

Published in:

Mechatronics, IEEE/ASME Transactions on  (Volume:16 ,  Issue: 1 )

Date of Publication:

Feb. 2011

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