We have developed electro-thermal 3D transient simulations in order to design an optimized heater for preconcentration membranes. An evaluation of parameters of simulation and boundary conditions have been done. We have validated our simulations by measuring results in fabricated heaters.
Published in:
Thermal Investigations of ICs and Systems (THERMINIC), 2010 16th International Workshop on
Date of Conference: 6-8 Oct. 2010