System Maintenance Notice:
Single article purchases and IEEE account management are currently unavailable. We apologize for the inconvenience.
By Topic

Characterization of electrodeposited Ni–Fe–SiC alloys for microelectromechanical applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
5 Author(s)
Zheng, Xiaohu ; Jiangsu Key Construction Laboratory of Numeric Machining Technology, Huaiyin Institute of Technology, Huaian 223003, China and MEMS and Nanotechnology Laboratory, School of Mechanical Systems Engineering, Chonnam National University, Gwangju 500-757, Republic of Korea ; Chen, Xing ; Gu, Feng ; Liu, YuanWei
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.3498740 

Ni–Fe–SiC alloy is a promising material for the fabrication of microactuators. In this article, the electrolytic codeposition technique is used to deposit the Ni–Fe–SiC composite onto stainless-steel substrates, where nickel becomes alloyed with iron as the binder phase, and SiC becomes alloyed as dispersed particles. Analysis of the morphology indicates that the deposited SiC nanoparticles are compact, with the orientation of the deposited crystal planes indexed as (111), (200), (220), (311), and (222). The resistivity of the deposited SiC nanoparticles is about 30×10-8 Ω m. When the loading of Fe (wt %) ranges from 10% to 50% in the deposit, the electrodeposit shows a strong paramagnetism with a lowest value of coercivity of 2.75×10-2 A/m. In addition, the remanence shows a monotonic decrease with an increasing iron content in the deposit. It is demonstrated that the electroformed Ni–Fe–SiC alloy has better electromagnetic properties and a higher corrosion resistance (with a corrosion rate of 0.17 mg/dm2h 2M HCl) than the electroformed Ni–Fe alloy (with a corrosion rate of 0.23 mg/dm2h).

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:28 ,  Issue: 6 )