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Cut-independent deep structuring of quartz for frequency control applications

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4 Author(s)
G. Thornell ; Mater. Sci. Div., Uppsala Univ., Sweden ; K. Hjort ; B. Studer ; J. -A. Schweitz

A method to achieve deep and direction independent structuring of laterally arbitrary geometry in single crystalline quartz is demonstrated. It is based on local etching of the latent track induced anisotropy resulting from heavy ion bombardment, and is independent of crystallographic orientation. Previous results are briefly reviewed and a more systematic and thorough study is presented together with the first results from a new modified technique based on shadow masking. Miniature tuning fork structures have been realised, and the suitability for frequency control is discussed on experimental basis

Published in:

Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.

Date of Conference:

5-7 Jun 1996