By Topic

Quartz microresonator sensors for monitoring thin film thickness

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Kawashima, H. ; Seiko Instrum. Inc., Matsudo, Japan ; Sunaga, K.

This paper describes a quartz microresonator sensor for monitoring thin film thickness. A microresonator of tuning fork-type with stepped vibration bars vibrating in torsion which can be approximately regarded as “clamped-free bar” is very available for monitoring thin film thickness because it has excellent frequency temperature behavior over a wide temperature range of room temperature to high one of about 200°C. In this paper, a relationship of resonant frequency to thin film thickness of Ak and Al is theoretically and experimentally clarified for the microresonator, so that the frequency deviation is proportional to the film thickness deposited on the top of the tuning arms, and the calculated values are in good agreement with the measured ones. This microresonator is, therefore, very available for monitoring thin film thickness

Published in:

Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.

Date of Conference:

5-7 Jun 1996