Referenced Items are not available for this document.
In the current times, microelectromechanical systems and nanoelectromechanical systems form a major interdisciplinary area of research involving science, engineering, and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This paper presents a review of the emerging advances in the modeling and control of these micro- and nanoscale devices and converges on the exciting research in on-chip control , with a mechatronics and controls perspective and concludes by projecting future trends.
Published in:
Systems, Man, and Cybernetics, Part C: Applications and Reviews, IEEE Transactions on
(Volume:41
,
Issue:
3
)
Date of Publication: May 2011
- Page(s):
- 350 - 364
- ISSN :
- 1094-6977
- INSPEC Accession Number:
- 11929681
- Digital Object Identifier :
- 10.1109/TSMCC.2010.2072779
- Product Type:
- Journals & Magazines
- Date of Publication :
- 27 September 2010
- Date of Current Version :
- 11 April 2011
- Issue Date :
- May 2011
- Sponsored by :
- IEEE Systems, Man, and Cybernetics Society
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