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Electrical Noise in MEMS Capacitive Elements Resulting From Environmental Mechanical Vibrations in Harsh Environments

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5 Author(s)
Dean, R.N. ; Dept. of Electr. & Comput. Eng., Auburn Univ., Auburn, AL, USA ; Anderson, A. ; Reeves, S.J. ; Flowers, G.T.
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Many microelectromechanical systems (MEMS) devices possess charged capacitor structures where the suspension system allows relative electrode motion due to internal or external stimuli. When such a device is subjected to external mechanical vibrations present in a harsh operating environment, unwanted movement between the capacitor plates can generate a noise current which is injected into the connected circuitry. This paper analyzes this phenomenon and presents a model for the dynamics of a MEMS device with capacitive plates experiencing relative motion due to external stimuli. A Fourier series expansion of the current is developed to characterize the frequency content of the signal in closed form for a given vibration frequency, and simulation and experimental results are presented.

Published in:

Industrial Electronics, IEEE Transactions on  (Volume:58 ,  Issue: 7 )

Date of Publication:

July 2011

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