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Semiconductor factory automation: designing for phased automation

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1 Author(s)
D. C. Gardner ; Hewlett-Packard Co., Corvalis, OR, USA

Hewlett-Packard has developed a strategy for phased semiconductor factory automation design and implementation. This strategy allows a semiconductor factory to incorporate progressive levels of factory control software components, automated material handling systems, and real-time process tool control to meet the growing and changing needs of a semiconductor facility. This paper discusses the benefits, interfaces, components and return on investment associated with automation phasing. Included are discussions on modular tool interfaces and control, distributed factory control systems, modular automated material handling systems, distributed stocking, facility systems design, rapid manual contingency operations, reliability considerations and cost benefits of phased approaches

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996

Date of Conference:

12-14 Nov 1996