Referenced Items are not available for this document.
The simulation model described offers many different opportunities for increasing understanding of a development wafer fab. The results of simulation runs must be analyzed with an understanding of the effect of randomness on the model. Multiple random number runs might be required to confirm a model result. Simulation models can account for dynamic interactions between wafers, tools and operators. The variety of statistics can be used to better understand and interpret the model results. Simulation provides the benefit of experimenting with the fab without buying equipment. In the case of Fujitsu, production volumes were increasing. The model provided information on staffing requirements and new tool acquisitions required to support higher levels of production
Published in:
Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996
Date of Conference: 12-14 Nov 1996
- Page(s):
- 17 - 22
- Meeting Date :
- 12 Nov 1996-14 Nov 1996
- ISSN :
- 1078-8743
- Print ISBN:
- 0-7803-3371-3
- INSPEC Accession Number:
- 5520381
- Conference Location :
- Cambridge, MA
- Digital Object Identifier :
- 10.1109/ASMC.1996.557964
- Product Type:
- Conference Publications
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