Photocluster productivity improvement

This paper describes improvements being implemented in a multi-technology, multi-partnumber IBM semiconductor fabricator to increase photocluster output. The work of various teams is presented, which have generated a host of enhancements, including a customized logistics system, host computer control, continuous lot chaining, a work-in-process (WIP) and reticle tracking system, area alarms for tool stoppages, staffing based on activity analysis, operator coverage improvements guided by delays determined from host control data and alignment assist reductions guided by host control data. Photocluster productivity has increased 35% since these changes were begun and more improvement is anticipated.