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Ultra-fast dual-stage vertical positioning for high performance SPMs

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3 Author(s)
Andrew J. Fleming ; School of Electrical Eng. and Computer Science, The University of Newcastle, NSW 2300, Australia ; Brian J. Kenton ; Kam K. Leang

A major speed limitation of Scanning Probe Microscopes (SPMs) is the low vertical feedback bandwidth imposed by the mechanical scanner resonances. The vertical feedback controller regulates the tip-sample interaction in application modes such as constant-current scanning tunneling microscopy and constant-force atomic force microscopy. To increase the vertical feedback bandwidth, dual-stage actuators have been proposed to increase the first resonance frequency. In this work, an ultra-fast dual-stage vertical positioner and control system are described. The first resonance frequency of the dual-stage positioner is 88 kHz which permits a one-hundred fold speed increase of a commercial AFM. The dual-stage system is simple, low-cost and can be retrofitted to almost any commercial SPM.

Published in:

Proceedings of the 2010 American Control Conference

Date of Conference:

June 30 2010-July 2 2010