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High speed nanopositioning with force feedback

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1 Author(s)
Andrew J. Fleming ; School of Electrical Engineering and Computer Science at the University of Newcastle, Callaghan, NSW 2308, Australia

In this work a new method for feedback control of nanopositioning systems is proposed. A measurement of the force applied to the moving platform by the actuator is utilized as a feedback variable for both tracking and damping control. Excellent tracking and damping performance can be achieved with a simple integral controller. Other outstanding characteristics include guaranteed stability and insensitivity to changes in resonance frequency. Experimental results on a high-speed nanopositioner demonstrate an increase in closed-loop bandwidth from 210 Hz (with an integral controller) to 2.07 kHz (with force feedback control). Gain-margin is simultaneously improved from 5 dB to infinity.

Published in:

Proceedings of the 2010 American Control Conference

Date of Conference:

June 30 2010-July 2 2010