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A variable MEMS capacitor with piezoresistive feedback is presented. The capacitor is fabricated in a commercial 0.35um CMOS process with MEMS post-processing. The work presented demonstrates a piezoresistive sensing scheme capable of controlling hysteresis effects in a CMOS-MEMS variable capacitor. Potential applications of the sensing scheme include closed-loop control of variable capacitors and detection of dielectric charging.
Date of Conference: 23-28 May 2010