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A MEMS variable capacitor with piezoresistive position sensing fabricated in a standard 0.35um CMOS process

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3 Author(s)
Zahirovic, N. ; Univ. of Waterloo, Waterloo, ON, Canada ; Mansour, R.R. ; Yu, M.

A variable MEMS capacitor with piezoresistive feedback is presented. The capacitor is fabricated in a commercial 0.35um CMOS process with MEMS post-processing. The work presented demonstrates a piezoresistive sensing scheme capable of controlling hysteresis effects in a CMOS-MEMS variable capacitor. Potential applications of the sensing scheme include closed-loop control of variable capacitors and detection of dielectric charging.

Published in:

Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International

Date of Conference:

23-28 May 2010