Referenced Items are not available for this document.
A variable MEMS capacitor with piezoresistive feedback is presented. The capacitor is fabricated in a commercial 0.35um CMOS process with MEMS post-processing. The work presented demonstrates a piezoresistive sensing scheme capable of controlling hysteresis effects in a CMOS-MEMS variable capacitor. Potential applications of the sensing scheme include closed-loop control of variable capacitors and detection of dielectric charging.
Published in:
Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International
Date of Conference: 23-28 May 2010
- Page(s):
- 1
- ISSN :
- 0149-645X
- E-ISBN :
- 978-1-4244-6057-1
- Print ISBN:
- 978-1-4244-6056-4
- INSPEC Accession Number:
- 11452719
- Conference Location :
- Anaheim, CA
- Digital Object Identifier :
- 10.1109/MWSYM.2010.5516079
- Product Type:
- Conference Publications
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