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Principle, characterization and control of a new hybrid thermo-piezoelectric microactuator

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2 Author(s)
Micky Rakotondrabe ; FEMTO-st Institute, UMR CNRS-6174 / UFC / ENSMM / UTBM, Automatic Control and Micro-Mechatronic Systems department, (AS2M department), 25000 Besançon - France ; Ioan Alexandru Ivan

This paper presents a new actuator based on a unimorph piezocantilever and on the thermal bimorph principle, called hybrid thermo-piezoelectric actuator. The main advantage of the proposed actuator is the high range of positioning from the thermal actuation and the high resolution and bandwidth from the piezoelectric one. A characterization and linear modeling are proposed. Finally, we propose an adapted control law to manage the two possible actuation types.

Published in:

Robotics and Automation (ICRA), 2010 IEEE International Conference on

Date of Conference:

3-7 May 2010