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In this paper, the design and packaging of fully integrated digitally controlled microelectromechanical system (MEMS) filters with low cost, high performance, and compact size are introduced. The four-channel switched filters operating in the frequency range of 11-20 GHz have been developed using MEMS technologies and four five-pole edge-coupled bandpass filters, which are modified from the traditional edge-coupled bandpass filter in the input and output feeders to achieve a better stopband performance. Microwave filters, MEMS circuits, and related packaging are investigated and demonstrated theoretically and experientially.
Date of Publication: July 2011