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Blind tracing of mechanical movement in electrostatic MEMS structures

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2 Author(s)
Szekely, V. ; Dept. of Electron Devices, Budapest Univ. of Technol. & Econ., Budapest, Hungary ; Szabó, P.G.

Electro-statically driven micro-mechanical structures are an interesting and frequently used category of MEMS elements. Investigation of their properties is important both for better understanding the device operation and for fault detection and diagnosis. To follow the movement of micro-parts in such elements involves difficulties since device packages inhibit looking into the chip. Our motivation is to develop methods for tracing the movement of MEMS parts without optical inspection. This “blind” tracing seems to be possible by the recording and analysis of the charging/discharging current of the electro-static actuator.

Published in:

Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on

Date of Conference:

5-7 May 2010