10-Gb/s Planar InGaAs P-I-N Photodetectors

The authors report the fabrication of high-performance planar InGaAs P-I-N buried heterostructure photodetectors (BH-PDs) by introducing mesa etching and refilling with semi-insulating InP. It was found that measured 3-dB bandwidth for the fabricated BH-PD was 12.4 GHz. For a given bandwidth of 1 kHz and a given bias of -5 V, it was found that noise equivalent powers our InGaAs P-I-N BH-PD were 6.05 × 10
^-14
W at 1310 nm and 4.36 × 10
^-14
W at 1550 nm, which correspond to normalize detectivity (D*) values of 2.3 × 10
¹²
cmHz
^0.5
W
^-1
and 3.2 × 10
¹²
cmHz
^0.5
W
^-1
, respectively. It was also found that eye diagram data measured from the proposed BH-PD met with the requirements of the OC-192 standard.