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Large area synthesis of graphene has been realized on top of a nickel-coated micro platform using the Micro Chemical Vapor Deposition (Micro-CVD) system. The capability of ultra-fast heating and cooling provided by the MEMS platform is crucial for the controlled growth of graphene. Theoretical analysis shows that cooling rate is about 4 orders of magnitude higher than the conventional CVD system. Experimentally, 1~2 layers of graphene structures have been consistently synthesized as confirmed by Raman spectroscopy on the whole 300 Ã 300 Â¿m2 platform. As such, this approach opens up a new class of opportunity in graphene synthesis.
Date of Conference: 24-28 Jan. 2010