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Highly linear, ultra sensitive bio-MEMS force sensors with large force measurement range

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3 Author(s)
Rajagopalan, J. ; Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA ; Tofangchi, A. ; Saif, M.T.A.

We have designed, fabricated, and characterized a set of displacement based micromechanical force sensors. These sensors combine high force resolution (50-500 pN) with large force measurement range (100 nN - 1 ¿N) and have highly linear force-displacement characteristics. In addition, we have established a novel scheme to avoid capillary forces during the immersion and removal of these sensors from aqueous environments that make them highly suitable for biological studies. As a demonstration of their versatility, these sensors are used to measure the mechanical response of embryonic Drosophila (fruit fly) axons in vivo.

Published in:

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Date of Conference:

24-28 Jan. 2010