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III-Nitride Schottky Rectifiers With an AlGaN/GaN/AlGaN/GaN Quadruple Layer and Their Applications to UV Detection

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6 Author(s)
Chang, P.C. ; Dept. of Electr. Eng., Kun Shan Univ., Yung-Kang, Taiwan ; Lee, K.H. ; Chang, S.J. ; Su, Y.K.
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III-nitride Schottky rectifiers (SRs) with (i.e., SR_A) and without (i.e., SR_B) the AlGaN/GaN/AlGaN/GaN quadruple layer were both fabricated. It was found that we could achieve a lower leakage current from SR_A. Under reverse bias, it was found that SR_A showed a more than five orders magnitude smaller dark current than that in SR_B. It was also found that lower on-state resistance was due to the larger Schottky barrier height and larger breakdown voltage was due to reduced defect densities in SR_A. The SRs with a quadruple layer was suitable for applications to low noise or/and ultraviolet (UV) detection as well.

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Sensors Journal, IEEE  (Volume:10 ,  Issue: 4 )