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Investigation of lifetime degradation of RIE-processed silicon samples for solar cells

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4 Author(s)
Ngwe Soe Zin ; The Australian National University, Canberra ACT 0200, Australia ; Andrew Blakers ; Klaus Weber ; Chun Zhang

Reactive Ion Etching (RIE) is observed to cause substantial effective carrier lifetime degradation in silicon wafers. Degradation of lifetime is permanent for samples where RIE etches into silicon, while the lifetime degradation is temporary for samples where RIE etches only dielectric layers of SiO2 grown on the wafer. The degradation of the effective lifetime of RIE-etched silicon samples can be minimized by exposing only a few percent of the wafer to the etch.

Published in:

Photovoltaic Specialists Conference (PVSC), 2009 34th IEEE

Date of Conference:

7-12 June 2009