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A 1.6 GHz NEMS actuator built from carbon nanotube layer by layer composite films

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4 Author(s)
Jang, M.W. ; Dept of Electr. & Comput. Eng, Univ of Minnesota, Minneapolis, MN, USA ; Lu, M. ; Cui, T. ; Campbell, S.A.

In summary, this paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes can be switched at low voltage and high frequency. The measured DC pull-in voltages ranged from 0.9V to 4.8 V depending on the length of the switch. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high-performance MEMS/NEMS. This work was supported by DARPA under SPA WAR grant number N66001-07-1-2060.

Published in:

Device Research Conference, 2009. DRC 2009

Date of Conference:

22-24 June 2009

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