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A novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers utilizing MNA method

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3 Author(s)
Tran, T.D. ; MEMS & Microsyst. Dept., VNUH, Hanoi, Vietnam ; Bui, T.T. ; Nguyen, T.P.

This paper presents the novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers using a MNA tool called SUGAR. The purpose of this novel method is to achieve the high sensitivity device. The dimension of sensor is as small as 1.5 mm2, so it is suitable for many specific applications.

Published in:

Micro-NanoMechatronics and Human Science, 2009. MHS 2009. International Symposium on

Date of Conference:

9-11 Nov. 2009