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A CMOS process for mixed mode signal design

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6 Author(s)
Chen, H.-S. ; Adv. Technol. Group, Nat. Semicond. Corp., USA ; Chih Sieh Teng ; Ji Zhao ; Moberly, L.
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In this paper we describe a modular approach to convert digital CMOS process for mixed-signal CMOS applications by incorporating LATID NMOSFET, HALO PMOSFET, and poly-to-substrate capacitors. Significant improvements in analog performance are achieved without degrading digital device characteristics

Published in:

Southcon/96. Conference Record

Date of Conference:

25-27 Jun 1996