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Optical electrostatic MEMS for wavelength switching

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1 Author(s)
Yuan Ma ; Electr. & Comput. Eng. Dept., Dalhousie Univ., Halifax, NS, Canada

An electrostatic micromirror is designed and fabricated using a standard MicroElectroMechanical Systems (MEMS) process. Active control approaches are proposed for driving actuation to eliminate micromirror ldquopull-inrdquo achieving enhanced device performance and functionality.

Published in:

Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia

Date of Conference:

Oct. 30 2008-Nov. 2 2008