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Wireless driving of micromirror using electromagnetic induction

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4 Author(s)
Minoru Sasaki ; Dept. of Advanced Science and Technology, Toyota Technological Institute, Hisakata 2-12-1, Tenpaku-ku, Nagoya 468-8511, Japan ; Narimune Ohnishi ; Shinya Kumagai ; Kazuhiro Hane

The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6deg at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.

Published in:

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Date of Conference:

17-20 Aug. 2009