Referenced Items are not available for this document.
In this study, effects due to 3D level stack on HF properties of 2D interconnections and 2D self inductors integrated in the back end of line (BEOL) are investigated. Self-inductors are considered as self coupled interconnects around a long loop where the magnetic field is confined. So, simple and coupled 2D interconnections of BEOL are studied in order to determine the influence of the silicon substrate stack on propagation delay, crosstalk and factor quality of 2D interconnects and self-inductors.
Published in:
3D System Integration, 2009. 3DIC 2009. IEEE International Conference on
Date of Conference: 28-30 Sept. 2009
- Page(s):
- 1 - 6
- E-ISBN :
- 978-1-4244-4512-7
- Print ISBN:
- 978-1-4244-4511-0
- INSPEC Accession Number:
- 10951289
- Conference Location :
- San Francisco, CA
- Digital Object Identifier :
- 10.1109/3DIC.2009.5306580
- Product Type:
- Conference Publications
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