By Topic

Dual-Chirality Helical Nanobelts: Linear-to-Rotary Motion Converters for Three-Dimensional Microscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Lixin Dong ; Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich, Switzerland ; Li Zhang ; Bradley E. Kratochvil ; Kaiyu Shou
more authors

A linear-to-rotary motion converter is demonstrated using 3-D SiGe/Si dual-chirality helical nanobelts (DCHNBs). Analytical and experimental investigation shows that the motion conversion has excellent linearity for small deflections. The conversion ratios of displacement and load for a SiGe/Si DCHNB (an 8-nm-thick Si0.6Ge0.4 and a 10-nm-thick Si layer) are found to be 171.3deg/mum and 2.110 times 10-6 Nmiddotm/N, respectively. The stiffness (0.033 N/m) is much smaller than that of bottom-up synthesized helical nanostructures, which is promising for high-resolution force measurement in nanoelectromechanical systems. To perform torque measurement, two atomic force microscope cantilevers are used for simultaneous characterization of axial and radial properties of the same nanostructure. An application related to 3-D imaging is shown in a scanning electron microscope. The ultracompact size makes it possible for DCHNBs to serve as rotary stages for creating 3-D scanning probe microscopes or microgoniometers.

Published in:

Journal of Microelectromechanical Systems  (Volume:18 ,  Issue: 5 )