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Combined air humidity and flow CMOS microsensor with on-chip 15 bit sigma-delta A/D interface

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6 Author(s)
Malcovati, P. ; Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland ; Haberli, A. ; Mayer, F. ; Paul, O.
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In this paper we present a batch fabricated multi-sensor chip for building control applications. A capacitive relative humidity sensor and a thermoelectric gas flow sensor have been integrated on a single chip together with a second order sigma-delta A/D converter, achieving 15 bit resolution. Both sensors are connected to the same sigma-delta modulator, without requiring any additional readout circuit. We report experimental results on a prototype realized with a commercial 2 /spl mu/m CMOS process.

Published in:

VLSI Circuits, 1995. Digest of Technical Papers., 1995 Symposium on

Date of Conference:

8-10 June 1995