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Advanced effective dispatching method for 300mm Twin-Phase Twin-Fab

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4 Author(s)
Cheng-Sheng Chang ; Rexchip Electronics Corp., NO.429-1, SANFONG RD., HOULI TOWNSHIP, TAICHUNG COUNTY, CENTRAL TAIWAN SCIENCE PARK, TAIWAN, R.O.C. ; Hsi-Lo Lo ; Cheng-Chung Pan ; De-Lung Wu

To establish a 300 mm-wafer large-scale Fab a lot of time and a large investment is needed. In order to reduce periods of Fab from construction to the actual manufacturing and make resource more efficient, we divided our Fab into 2 phase full line Fab called Twin-Phase Fab. Because we currently have 300 mm Twin-Phase Twin-Fab now, dispatching is more complicated. We develop an advanced RTD (Real-Time Dispatching) system to assist our manufacturing to face complicated dispatching issues. This advanced RTD system has been implemented into one 300 mm Fab and proved to enhance waiting-time difference from 2.4 hours to 0.9 hours. The number of inefficient cross-phase transfer also decreased by 92%.

Published in:

2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference

Date of Conference:

10-12 May 2009