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A new technique to determine oxide trap time constants in a 0.6 /spl mu/m n-MOSFET subject to hot electron stress has been proposed. In this method, we used GIDL current as a direct monitor of the oxide charge detrapping-induced transient characteristics. An analytical model relating the GIDL current evolution to oxide trap time constants was derived. Our result shows that under a field-emission dominant oxide charge detrapping condition, Vgs=-4 V and Vds=3 V, the hot electron stress generated oxide traps exhibit two distinct time constants from seconds to several tens of seconds.