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A micromachined fully differential lateral accelerometer

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2 Author(s)
M. Lemkin ; Sensor & Actuator Center, California Univ., Berkeley, CA, USA ; B. E. Boser

A monolithic surface micromachined lateral accelerometer with on-chip A/D converter is described. The device features a fully differential capacitive interface between the sensing element and on-chip electronics to minimize the systematic offset and errors due to switch charge injection. The common centroid layout of the sensor interface reduces cross-axis sensitivity and susceptibility to angular accelerations. The measured noise-floor of the device is 500 μg/√(Hz) and the fullscale range is ±3.5 g(1 g=9.8m/sec 2)

Published in:

Custom Integrated Circuits Conference, 1996., Proceedings of the IEEE 1996

Date of Conference:

5-8 May 1996