A 3D Parallel Monte Carlo Simulator for Semiconductor Devices

We developed a 3D parallel full band Monte Carlo simulator for semiconductor devices. This enables us to simulate 3D devices on high performance multiprocessor machines. By utilizing the JASMIN software package, parallel execution issues such as processors communication, grid partitioning and load balancing are handled easily and efficiently. The 3D MC simulator is validated by comparing its results with that from 2D 70 nm SOI MOSFET simulations. We present speedup and load balancing results of our 3D simulator to show the parallel efficiency. A FinFet model, is simulated for application.