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Deformation Measurements of High-Speed MEMS With Combined Two-Wavelength Single-Pulse Digital Holography and Single Phase Reconstruction Using Subpicosecond Pulses

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6 Author(s)
Thomas Hansel ; Max Born Inst. for Nonlinear Opt. & Short Pulse Spectrosc., Berlin, Germany ; Ruediger Grunwald ; Klaus Reimann ; Jens Bonitz
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Holographic contouring of high-speed microelectromechanical system optical scanner mirrors operating at resonance frequencies close to 1 kHz is performed with ultrashort-pulse lasers containing two spectral components. These particular pulses are obtained by shaping the spectrum of sub-30 fs pulses of a Ti:sapphire laser system by an acousto-optic programmable dispersive filter. The separation of the two spectral components is adjustable within the 50-nm gain bandwidth. Single-pulse dual-wavelength contouring is achieved by an extended Twyman-Green type interferometer including two CMOS cameras. The deformation obtained from a single-wavelength interferogram is combined with the coarse-shape information deduced from the phase difference map of the two interferograms captured at different wavelengths to yield a combined reconstruction.

Published in:

IEEE Journal of Selected Topics in Quantum Electronics  (Volume:15 ,  Issue: 5 )