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Surface acoustic wave properties of (100) AIN films on diamond with different IDT positions

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4 Author(s)
Z. -X. Lin ; Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan, ROC (e-mail: ; S. Wu ; R. Ro ; M. S. Lee

(100)AlN films have better surface acoustic wave (SAW) properties than (002) AlN films. In this research, (100) AlN films were combined with diamonds as a new composite SAW substrate. The SAW properties of (100) AlN films on diamonds were analyzed with 4 composite structures: interdigital transducer (IDT)/(100)AlN/diamond, (100)AlN/IDT/diamond, IDT/(100)AlN/metal/diamond, and metal/IDT/(100) AlN/diamond, and they exhibited some excellent SAW properties. Our research results provide a predictable and theoretical basis for further application on high-velocity SAW devices.

Published in:

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:56 ,  Issue: 6 )