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We have fabricated arrays of semiconductor microdisks with diameters from 3.5-9 /spl mu/m using wet chemical etching in combination with epitaxial lift-off and metallic bonding techniques. The microdisks are supported on glass for higher optical confinement and to allow novel annular geometries. The optically pumped microdisks have high-Q (>2000) modes, low-pump thresholds (<20 /spl mu/W) and multimode lasing at liquid nitrogen temperatures. Successive modes are excited by temperature tuning the bandgap.
Date of Publication: July 1996