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Assembly of Micro-3-D Components on SOI Wafers Using Novel SU-8 Locking Mechanisms and Vertical One-Push Operation

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4 Author(s)
Yi Chiu ; Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Chang-Shiou Wu ; Wei-Zhi Huang ; Jhong-Wei Wu

A novel out-of-plane assembly technique of 3-D microstructures is proposed and demonstrated by using simple vertical one-push operations. This one-push method has large probe positioning tolerance in both vertical and lateral directions to reduce the overall complexity of the assembly process. Micromirrors and corner cube reflectors are fabricated on silicon-on-insulator wafers using SU-8 photoresist as a second structure layer in a low-temperature process. Batch assembly of multiple mirrors assembled simultaneously is demonstrated.

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:15 ,  Issue: 5 )