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Two-Laser Lithography Shrinks Transistors on the Cheap

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Engineers are near the outer limits of what can be done with optical lithography, the process by which light shone through a patterned mask defines the fine structures of microprocessors and memory chips. Now three teams of optics experts have independently hit upon what could turn out to be a way to extend optical lithography¿s use¿and, what¿s even more critical, to do it cheaply.

Published in:

Spectrum, IEEE  (Volume:46 ,  Issue: 6 )