Referenced Items are not available for this document.
Engineers are near the outer limits of what can be done with optical lithography, the process by which light shone through a patterned mask defines the fine structures of microprocessors and memory chips. Now three teams of optics experts have independently hit upon what could turn out to be a way to extend optical lithography¿s use¿and, what¿s even more critical, to do it cheaply.
Published in:
Spectrum, IEEE
(Volume:46
,
Issue:
6
)
Date of Publication: June 2009
- Page(s):
- 16
- ISSN :
- 0018-9235
- Digital Object Identifier :
- 10.1109/MSPEC.2009.4977597
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 27 May 2009
- Issue Date :
- June 2009
- Sponsored by :
- IEEE
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