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Modification of polymethylmethacrylate by deep ultraviolet radiation and bromination for photonic applications

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4 Author(s)
Henzi, P. ; Forschungszentrum Karlsruhe GmbH, Institute for Microstructure Technology, P.O. Box 3460, 76021 Karlsruhe, Germany ; Bade, K. ; Rabus, D.G. ; Mohr, J.

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Deep UV-induced modification of the refractive index of polymers is a useful technique for realizing integrated optical circuits for telecommunication and sensor applications. The combination with replication techniques such as hot embossing opens up a variety of possibilities such as a monolithic integration in optical or fluidic microsystems. In this article the fundamental understanding of the deep UV process is given including examples of fabricated waveguide based devices.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 4 )