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Si nanowires sheathed with thin diamondlike carbon films

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7 Author(s)
Qiu, T. ; National Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Nanjing 210093, People’s Republic of China and Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong, People’s Republic of China ; Wu, X.L. ; Yang, L.W. ; Shen, P.N.
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Via electroless metal deposition and industrial plasma technology, we have successfully synthesized unique composite silicon nanowire structures with diamondlike carbon (DLC) sheaths acting as inorganic passivation layers. We have also discussed their growth mechanism in terms of a self-organization process. The thickness of the DLC sheaths were quantified with Raman spectroscopy. The Raman analytical result is in good agreement with direct microstructure observations.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 4 )

Date of Publication:

Jul 2006

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