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High-resolution three-dimensional reconstruction: A combined scanning electron microscope and focused ion-beam approach

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4 Author(s)
Bansal, R.K. ; Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904 ; Kubis, A. ; Hull, R. ; Fitz-Gerald, J.M.

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The ability to obtain three-dimensional information has always been important to gain insight and understanding into material systems. Three-dimensional reconstruction often reveals information about the morphology and composition of a system that can otherwise be obscured or misinterpreted by two-dimensional images. In this article, we describe tomographic measurements with 10 nm scale resolution, combining focused ion-beam processing with field-emission scanning electron microscopy to obtain a series of high-resolution two-dimensional cross-sectional images. The images were then concatenated in a computer and interpolated into three-dimensional space to assess and visualize the structure of the material. The results of this research demonstrate the use of tomographic reconstruction of SiSi/Ge and θ Al2Cu samples to reproduce the three-dimensional morphology with sub-10 nm resolution.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 2 )