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The goal of this work is to investigate the use of thermal annealing of thin metallic layers buried in a capping ceramic material to obtain controlled synthesis of metallic nanocrystals, i.e., to achieve nanocrystal formation with size control and narrow size distribution.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:23 , Issue: 4 )
Date of Publication: Jul 2005