Cart (Loading....) | Create Account
Close category search window
 

Atmospheric pressure operation of a field emission diode based on self-assembled silicon nanostructures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Lu, C.-T. ; Nanostructure Engineering Science and Technology (NEST) Group and Department of Electrical and Electronic Engineering, University of Canterbury, Christchurch, New Zealand ; Johnson, S. ; Lansley, S P ; Blaikie, R.J.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1941168 

We report on the field emission from self-assembled silicon nanostructures fabricated on n-type silicon (100) substrates using electron beam annealing. Arrays of nanostructures with an average height of 8 nm were formed by substrate annealing at 1100 °C for 15 s. Simple field emission diode structures were fabricated using these nanostructured silicon substrates as cathodes separated from an aluminium anode by a 1 μm thick layer of photoresist. The dielectric leakage current was less than 0.4 nA which was found to be a negligible component of the field emitted current flowing through the diode. Following conditioning, the Si nanostructure field emission characteristics become stable and reproducible with Fowler–Nordheim tunneling occurring for fields as low as 3.2 V μm-1. At higher fields, current saturation effects are observed with current-field characteristics typical of space charge limited conduction. The low voltage operation of this device results in suppression of ionizing electron–molecule collisions and the diode has thus been shown to work well at atmospheric pressure.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:23 ,  Issue: 4 )

Date of Publication:

Jul 2005

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.