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Browse Journals & Magazines > Journal of Vacuum Science & T ...> Volume:22 Issue:3 Help

Multicolumn cell: Evaluation of the proof of concept system

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8 Author(s)
Haraguchi, T. ; Nanotechnology 1st Business Division, Advantest Corporation, Ohtone Research and Development Center, 1-5, Shin-tone, Ohtone-machi, Kitasaitama-gun, Saitama 349-1158, Japan ; Sakazaki, T. ; Satoh, T. ; Nakano, M.
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Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1715014 

The beam performance of the electron optics proof of concept (POC) multicolumn-cell (MCC) system has been evaluated. The two beams at the near center of a 4×4 layout with 25 mm pitch show good uniformity and low interference. The MCC system is imaged with a variable-shaped beam and character projection electron optical system having a vector scan beam deflection and a “write-on-the-fly” stage motion control. Cost performance analysis gives the most effective number of column cells in the MCC system. © 2004 American Vacuum Society.

Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:22 ,  Issue: 3 )

Date of Publication: May 2004

Page(s):
985 - 988
ISSN :
1071-1023
Digital Object Identifier :
10.1116/1.1715014
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
May 2004

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