Referenced Items are not available for this document.
Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1603287
In this work we determine the critical flow parameters for three diamond sonic micronozzles and one microtube fabricated to work as passive gas flow controllers and flowmeters under choking conditions. The critical mass flow rate, the Reynolds numbers and the discharge coefficients of our diamond sonic microdevices were determined at low-pressure conditions. © 2003 American Vacuum Society.
Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
(Volume:21
,
Issue:
5
)
Date of Publication: Sep 2003
- Page(s):
- 2034 - 2037
- ISSN :
- 1071-1023
- Digital Object Identifier :
- 10.1116/1.1603287
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 June 2009
- Issue Date :
- Sep 2003
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
