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In this work we determine the critical flow parameters for three diamond sonic micronozzles and one microtube fabricated to work as passive gas flow controllers and flowmeters under choking conditions. The critical mass flow rate, the Reynolds numbers and the discharge coefficients of our diamond sonic microdevices were determined at low-pressure conditions. © 2003 American Vacuum Society.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:21 , Issue: 5 )
Date of Publication: Sep 2003