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A self-calibrating barrier-detector microsystem in standard silicon circuit technology

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4 Author(s)
Kuratli, C. ; Swiss Federal Inst. of Technol., Zurich, Switzerland ; Huang, Q. ; Brand, O. ; Baltes, H.

The realization of an ultrasound barrier system using micromachined silicon membranes is discussed. The transducer membranes are fabricated using a standard bipolar/CMOS process plus one additional etching step which facilitates the co-integration of sensor and read-out electronics. A transmitter and receiver incorporating a self calibrating scheme to overcome matching problems between transmitter and receiver resonance frequencies are described

Published in:

Industrial Electronics, 1995. ISIE '95., Proceedings of the IEEE International Symposium on  (Volume:2 )

Date of Conference:

10-14 Jul1995

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